| Document Type
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BL
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| Record Number
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1024908
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| Doc. No
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b779278
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| Title & Author
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Plasma deposition of amorphous silicon-based materials /\ edited by Giovanni Bruno, Pio Capezzuto, Arun Madan.
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| Publication Statement
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Boston :: Academic Press,, ©1995.
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| Series Statement
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Plasma--materials interactions
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| Page. NO
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1 online resource (xi, 324 pages) :: illustrations.
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| ISBN
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0080539106
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: 1281054100
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: 9780080539102
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: 9781281054104
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012137940X
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9780121379407
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| Bibliographies/Indexes
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Includes bibliographical references and index.
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| Contents
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Front Cover; Plasma Deposition of Amorphous Silicon-Based Materials; Copyright Page; Contents; Contributors; Preface; Chapter 1. Chemistry of Amorphous Silicon Deposition Processes: Fundamentals and Controversial Aspects; Chapter 2. Diagnostics of Amorphous Silicon (a-Si) Plasma Processes; Chapter 3. Deposition Conditions and the Optoelectronic Properties of a-Si:H Alloys; Chapter 4. Reactor Design for a-Si:H Deposition; Chapter 5. Optoelectronic Properties of Amorphous Silicon Using the Plasma- Enhanced Chemical Vapor Deposition (PECVD) Technique; Chapter 6. Amorphous-Silicon-Based Devices.
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| Abstract
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Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference book written by leading authorities in the field. This volume links the fundamental growth kinetics involving complex plasma chemistry with the resulting semiconductor film properties and the subsequent effect on the performance of the electronic devices produced.
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| Subject
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Amorphous semiconductors-- Design and construction.
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Plasma-enhanced chemical vapor deposition.
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Silicon alloys.
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Amorphous semiconductors-- Design and construction.
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Plasma-enhanced chemical vapor deposition.
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Silicon alloys.
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TECHNOLOGY ENGINEERING-- Electronics-- Semiconductors.
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| Subject
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TECHNOLOGY ENGINEERING-- Electronics-- Solid State.
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| Dewey Classification
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621.3815/2
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| LC Classification
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TK7871.99.A45P55 1995eb
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| Added Entry
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Bruno, Giovanni.
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Capezzuto, Pio.
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Madan, A., (Arun)
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