Enhanced dynamic range fringe projection for micro-structure characterization

مرکز و کتابخانه مطالعات اسلامی به زبان های اروپایی

منو

" Enhanced dynamic range fringe projection for micro-structure characterization "
Ayman Mohammad Samara A. D. Davies

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	54382
Doc. No	:	TL24336
Call number	:	‭3194209‬
Main Entry	:	Ayman Mohammad Samara
Title & Author	:	Enhanced dynamic range fringe projection for micro-structure characterization\ Ayman Mohammad Samara
College	:	The University of North Carolina at Charlotte
Date	:	2005
Degree	:	Ph.D.
student score	:	2005
Page No	:	162-162 p.
Abstract	:	We present a solution for one of the main limitations in classical interferometry and fringe projection, which is the dynamic range limitation. The technique is based on real time inverse fringe projection to enhance the dynamic range and increase the vertical resolution without the need of prior information about the test object or the system parameters. The object's form optical path difference map is first measured, and then used to generate inverse fringes to optically filter the low spatial frequency form. The surface finish can then be measured without the impact of the form. A stereo microscope-based fringe projection system was designed, constructed, and used to illustrate the technique. The system was also used to characterize solder bumps with an uncertainty of approximately 10%. Individual solder bumps were also characterized using Zygo's NewView(TM) scanning white light interferometer (SWLI), and the results were compared to measurements on Intel's bump metrology tool. The results show that the SWLI has the lowest uncertainty and maximum repeatability but the lowest measurement speed. Intel's tool has a repeatability of approximately 1% and a measurement speed of about 10 minutes per 100,000 bumps, making it suitable for high volume process control.
Subject	:	Pure sciences; Dynamic range; Fringe projection; Microstructure; Optical metrology; Optics; 0752:Optics
Added Entry	:	A. D. Davies
Added Entry	:	The University of North Carolina at Charlotte