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" Plasma sources for thin film deposition and etching "


Document Type : BL
Record Number : 571332
Doc. No : b400551
Title & Author : Plasma sources for thin film deposition and etching\ edited by Maurice H. Francombe, John L. Vossen ; contributors Richard A. Gottscho [and four others].
Publication Statement : San Diego, [California] :: Academic Press,, 1994.
Series Statement : Physics of Thin Films: Advances in Research and Development ;; Volume 18
ISBN : 9780125330183
: : 9780080925134
Bibliographies/Indexes : Includes bibliographical references at the end of each chapters and indexes.
Subject : Thin films.
Added Entry : Francombe, Maurice H.
: Vossen, John L.
: Gottscho, R. A.
Added Entry : ScienceDirect (Online service).
copyhttps://lib.clisel.com/site/catalogue/571332
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