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" Nanolithography "


Document Type : BL
Record Number : 572711
Doc. No : b401930
Title & Author : Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems /\ edited by Martin Feldman.
Publication Statement : Philadelphia, PA :: Woodhead Pub.,, 2014.
Series Statement : Woodhead Publishing series in electronic and optical materials,; number 42
ISBN : 9780857095008
: : 9780857098757
Bibliographies/Indexes : Includes bibliographical references and index.
Subject : Nanolithography.
Subject : Nanophotonics.
Subject : Nanotechnology.
Subject : Nanostructured materials-- Design and construction.
Added Entry : Feldman, Martin.
Added Entry : ScienceDirect (Online service).
copyhttps://lib.clisel.com/site/catalogue/572711
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