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" The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2 "
edited by C. Robert Helms, Bruce E. Deal.
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BL
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| Record Number
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575603
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b404822
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| Main Entry
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Helms, C. Robert.
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| Title & Author
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The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2\ edited by C. Robert Helms, Bruce E. Deal.
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| Publication Statement
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Boston, MA :: Springer US :: Imprint: Springer,, 1993.
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| ISBN
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9781489915887
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: 9781489915900
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| Subject
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Chemistry.
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Chemistry, Physical organic.
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Computer engineering.
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Optical materials.
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| Added Entry
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Deal, Bruce E.
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SpringerLink (Online service)
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| Parallel Title
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Proceedings of the Electronics and Dielectrics Science Divisions of the Electrochemical Society's Second Symposium on the Physics and Chemistry of the SiO2 and the Si-SiO2 Interface held in St. Louis, Missouri, May 18-21, 1992
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