| Document Type
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BL
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| Record Number
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576127
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| Doc. No
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b405346
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| Main Entry
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Campbell, Stephen A.,1954-
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| Title & Author
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Fabrication engineering at the micro and nanoscale\ Stephen A. Campbell.
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| Edition Statement
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3rd ed.
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| Publication Statement
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New York :: Oxford University Press,, 2008.
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| Series Statement
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The Oxford series in electrical and computer engineering
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| ISBN
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9781613441107
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: 161344110X
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| Notes
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Rev. ed. of: The science and engineering of microelectronic fabrication. 2nd. ed.
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| Bibliographies/Indexes
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Includes bibliographical references and index.
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| Contents
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An introduction to microelectronic fabrication -- Semiconductor substrates -- Diffusion -- Thermal Oxidation -- Ion Implantation -- Rapid thermal processing -- Optical lithography -- Photoresists -- Nonoptical lithographic techniques -- Vacuum Science and plasmas -- Etching -- Physical deposition: evaporation and sputtering -- Chemical vapor deposition -- Epitaxial growth -- Device isolation, contacts, and metalization -- CMOS technologies -- Other transistor technologies -- Optoelectronic technologies -- MEMS -- Integrated circuit manufacturing.
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| Subject
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Semiconductors-- Design and construction.
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| Subject
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Semiconductors-- Mathematical models.
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| Added Entry
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Campbell, Stephen A.,1954-
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| Added Entry
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Knovel (Firm)
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