| Document Type
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BL
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| Record Number
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577840
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| Doc. No
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b407059
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| Main Entry
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Reimer, Ludwig.
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| Title & Author
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Scanning Electron Microscopy : Physics of Image Formation and Microanalysis /\ by Ludwig Reimer.
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| Edition Statement
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Second Completely Revised and Updated Edition.
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| Publication Statement
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Berlin, Heidelberg :: Springer Berlin Heidelberg :: Imprint: Springer,, 1998.
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| Series Statement
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Springer Series in Optical Sciences,; 45
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| ISBN
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9783540389675
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: 9783642083723
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| Contents
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Electron Optics of a Scanning Electron Microscope -- Electron Scattering and Diffusion -- Emission of Backscattered and Secondary Electrons -- Electron Detectors and Spectrometers -- Image Contrast and Signal Processing -- Electron-Beam-Induced Current and Cathodoluminescence -- Special Techniques in SEM -- Crystal Structure Analysis by Diffraction -- Elemental Analysis and Imaging with X-Rays.
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| Abstract
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Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
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| Subject
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Physics.
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| Added Entry
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SpringerLink (Online service)
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