|
" Technology of Integrated Circuits "
by Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller.
| Document Type
|
:
|
BL
|
| Record Number
|
:
|
577859
|
| Doc. No
|
:
|
b407078
|
| Main Entry
|
:
|
Widmann, Dietrich.
|
| Title & Author
|
:
|
Technology of Integrated Circuits\ by Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller.
|
| Publication Statement
|
:
|
Berlin, Heidelberg :: Springer Berlin Heidelberg :: Imprint: Springer,, 2000.
|
| Series Statement
|
:
|
Springer Series in ADVANCED MICROELECTRONICS,; 2
|
| ISBN
|
:
|
9783662041604
|
|
|
:
|
: 9783642085475
|
| Contents
|
:
|
Introduction -- Basic Principles of Integrated Circuit Technology -- Film Technology -- Lithography -- Etching Technology -- Doping Technology -- Cleaning Technology -- Process Integration.
|
| Abstract
|
:
|
Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing.
|
| Subject
|
:
|
Engineering.
|
| Subject
|
:
|
Chemical engineering.
|
| Subject
|
:
|
Electronics.
|
| Subject
|
:
|
Optical materials.
|
| Added Entry
|
:
|
Mader, Hermann.
|
|
|
:
|
Friedrich, Hans.
|
|
|
:
|
Heywang, Walter.
|
|
|
:
|
Müller, Rudolf.
|
| Added Entry
|
:
|
SpringerLink (Online service)
|
| |