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" Laser Processing and Chemistry "
by Dieter Bäuerle.
Document Type
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BL
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Record Number
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577864
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Doc. No
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b407083
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Main Entry
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Bäuerle, Dieter.
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Title & Author
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Laser Processing and Chemistry\ by Dieter Bäuerle.
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Edition Statement
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Third, Revised and Enlarged Edition.
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Publication Statement
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Berlin, Heidelberg :: Springer Berlin Heidelberg :: Imprint: Springer,, 2000.
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Series Statement
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Advanced Texts in Physics,
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ISBN
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9783662040744
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: 9783642086144
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Contents
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I Overview and Fundamentals -- 1 Introduction -- 2 Thermal, Photophysical, and Photochemical Processes -- 3 Reaction Kinetics and Transport of Species -- 4 Nucleation and Cluster Formation -- 5 Lasers, Experimental Aspects, Spatial Confinement -- II Temperature Distributions and Surface Melting -- 6 General Solutions of the Heat Equation -- 7 Semi-infinite Substrates -- 8 Infinite Slabs -- 9 Non-uniform Media -- 10 Surface Melting -- III Material Removal -- 11 Vaporization, Plasma Formation -- 12 Nanosecond-Laser Ablation -- 13 Ultrashort-Pulse Laser Ablation -- 14 Etching of Metals and Insulators -- 15 Etching of Semiconductors -- IV Material Deposition -- 16 Laser-CVD of Microstructures -- 17 Growth of Fibers -- 18 Direct Writing -- 19 Thin-Film Formation by Laser-CVD -- 20 Adsorbed Layers, Laser-MBE -- 21 Liquid-Phase Deposition, Electroplating -- 22 Thin-Film Formation by Pulsed-Laser Deposition and Laser-Induced Evaporation -- V Material Transformations, Synthesis and Structure Formation -- 23 Structural Transformations, Laser Cleaning -- 24 Doping -- 25 Cladding, Alloying, and Synthesis -- 26 Oxidation, Nitridation, and Reduction -- 27 Transformation and Decomposition of Organic Materials -- 28 Instabilities and Structure Formation -- VI Measurement Techniques, Diagnostics -- 29 Measurement Techniques -- 30 Analysis of Species, Plasmas, and Surfaces -- Appendices -- A Definitions and Formulas -- A.1 Symbols and Conversion Factors -- A.2 Abbreviations, Acronyms -- A.3 Mathematical Functions and Relations -- A.3.1 Bessel Function -- A.3.2 Error Function -- A.3.3 Exponential Integral Function -- A.3.4 Gamma Function -- A.3.5 Heaviside Function -- A.3.6 Jacobian Theta Function -- A.4.1 Axial Temperature Distribution for Infinite Slabs -- A.4.2 Axial Temperature Distribution for Semi-infinite Substrates -- B Tabular Presentation of the Materials Investigated -- B.1 Ablation of Inorganic Materials -- B.2 Ablation of Organic Polymers -- B.3 Materials Etching -- B.4 LCVD of Microstructures -- B.5 Thin-Film Formation by LCVD -- B.6 Deposition From Adsorbed Layers and Atomic/Molecular Beams -- B.7 Deposition from Liquids -- B.8 Formation of Thin Films and Heterostructures by PLD -- B.9 Laser Cleaning of Substrates from Particulates -- B.10 Surface Oxidation, Nitridation, and Reduction -- B.11 Transformation and Decomposition of Organic Materials, Laser Lithography -- B.12 Biological and Medical Applications -- C Tables -- References.
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Abstract
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Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser-matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas-solid, liquid-solid, and solid-solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. This third edition has been revised and enlarged to cover new topics such as the synthesis of nanoclusters and nanocrystalline films, ultrashort-pulse laser processing, laser polishing, cleaning, and lithography. Graduate students, physicists, chemists, engineers, and manufacturers alike will find this book an invaluable reference work on laser processing.
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Subject
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Physics.
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Subject
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Structural control (Engineering).
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Subject
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Surfaces (Physics).
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Added Entry
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SpringerLink (Online service)
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