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" Production planning and control for semiconductor wafer fabrication facilities "
Lars Mönch, John W. Fowler, Scott J. Mason
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BL
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| Record Number
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590374
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| Doc. No
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b419593
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| Main Entry
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Mönch, Lars
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| Title & Author
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Production planning and control for semiconductor wafer fabrication facilities : modeling, analysis, and systems /\ Lars Mönch, John W. Fowler, Scott J. Mason
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| Publication Statement
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New York, NY :: Springer,, c2013
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| Series Statement
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Operations research/Computer science interfaces series,; v.52
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| Page. NO
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1 online resource (xii, 288 p.): ill
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| ISBN
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9781461444725 (electronic bk.)
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: 1461444721 (electronic bk.)
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9781461444718
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| Bibliographies/Indexes
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Includes bibliographical references and index
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| Subject
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Semiconductors-- Design and construction
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Semiconductor wafers-- Design and construction
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| Subject
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Production planning
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| Dewey Classification
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621.3815/2
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| LC Classification
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TK7871.85.P76 2013
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TK7871.85.P76 2013
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| Added Entry
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Fowler, J. W., (John W.)
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Mason, Scott J
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| Added Entry
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Ohio Library and Information Network
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