| Document Type
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BL
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| Record Number
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595090
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| Doc. No
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b424309
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| Main Entry
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Lawes, Ronald A.
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| Title & Author
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MEMS cost analysis : : from laboratory to industry /\ Ron Lawes
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| Page. NO
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xvi, 289 pages :: illustrations ;; 24 cm
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| ISBN
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9789814411066
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: 981441106X
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9789814411073
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| Bibliographies/Indexes
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Includes bibliographical references and index
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| Contents
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1. The world of MEMS -- 2. Basic fabrication processes -- 3. Surface micromachining -- 4. High-aspect-ratio micromachining -- 5. MEMS testing -- 6. MEMS packaging -- 7. Clean rooms, buildings and plant -- 8. The MEMSCOST spreadsheet -- 9. Product costs : accelerometers -- 10. Product costs : microphones -- 11. MEMS foundries -- 12. Financial reporting and analysis -- 13. Conclusions
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| Subject
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Microelectromechanical systems-- Design and construction-- Costs
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| Subject
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Microelectromechanical systems industry-- Costs
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| Dewey Classification
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621.381
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| Parallel Title
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Microelectromechanical systems cost analysis
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