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" New approaches to image processing based failure analysis of nano-scale ULSI devices / "


Document Type : BL
Record Number : 596988
Doc. No : b426207
Main Entry : Zalevsky, Zeev
Title & Author : New approaches to image processing based failure analysis of nano-scale ULSI devices /\ Zeev Zalevsky, Pavel Livshits, Eran Gur
Series Statement : Micro and Nano Technologies Series
Page. NO : 101 pages :: illustrations ;; 23 cm
ISBN : 9780323241434
: : 0323241433
Bibliographies/Indexes : Includes bibliographical references
Abstract : New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise
Subject : Integrated circuits-- Ultra large scale integration-- Testing
Subject : Nanoelectronics
Subject : Microelectronics
Dewey Classification : ‭621.4‬
Added Entry : Livshits, Pavel
: Gur, Eran
copyhttps://lib.clisel.com/site/catalogue/596988
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