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" Fine line lithography / "
edited by Roger Newman
| Document Type
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BL
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| Record Number
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597775
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| Doc. No
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b426994
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| Title & Author
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Fine line lithography /\ edited by Roger Newman
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| Publication Statement
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Amsterdam ;New York :: North-Holland Pub. Co. ;New York :: sole distributor for the USA and Canada, Elsevier North-Holland,, 1980
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| Series Statement
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Materials processing, theory and practices ;; v. 1
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| Page. NO
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vii, 481 p. ;; 23 cm
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| ISBN
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0444853510
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| Bibliographies/Indexes
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Includes bibliographies and index
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| Subject
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Integrated circuits-- Large scale integration
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| Subject
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Lithography
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| Dewey Classification
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621.381/73
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| LC Classification
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TK7874.F56
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| Added Entry
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Newman, Roger
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