Sputtering materials for VLSI and thin film devices /

" Sputtering materials for VLSI and thin film devices / "
Jaydeep Sarkar

Document Type	:	BL
Record Number	:	598900
Doc. No	:	b428119
Main Entry	:	Sarkar, Jaydeep, (Materials scientist)
Title & Author	:	Sputtering materials for VLSI and thin film devices /\ Jaydeep Sarkar
Edition Statement	:	First edition
Page. NO	:	x, 603 pages :: illustrations ;; 25 cm
ISBN	:	9780815515937
	:	: 0815515936
Bibliographies/Indexes	:	Includes bibliographical references and index
Subject	:	Microelectronics-- Materials
Subject	:	Cathode sputtering (Plating process)-- Materials
Subject	:	Flat panel displays-- Materials
Subject	:	Thin film devices-- Materials
Subject	:	Integrated circuits-- Very large scale integration-- Materials
Subject	:	Sputtering (Physics)
Dewey Classification	:	‭621.381‬
LC Classification	:	‭TK7874‬‭.S275 2014‬
	:	‭TK7874‬‭.S275 2014‬

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