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" Introduction to microlithography : "
L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
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BL
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| Record Number
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599166
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b428385
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| Title & Author
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Introduction to microlithography : : theory, materials, and processing /\ L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
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| Series Statement
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ACS symposium series,; 219
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ix, 363 pages :: illustrations ;; 24 cm
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| ISBN
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0841207755
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Includes bibliographical references and index
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| Contents
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An introduction to lithography / L.F. Thompson -- The lithographic process--the physics / L.F. Thompson and M.J. Bowden -- Organic resist materials--theory and chemistry / C. Grant Willson -- Resist processing / L.F. Thompson and M.J. Bowden -- Plasma etching / J.A. Mucha and D.W. Hess -- Multi-layer resist systems / B.J. Lin
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Microlithography, Congresses
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Photoresists, Congresses
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Plasma etching, Congresses
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Thompson, L. F.,1944-
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Willson, C. G., (C. Grant),1939-
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Bowden, M. J.,1943-
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American Chemical Society., Division of Organic Coatings and Plastics Chemistry
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American Chemical Society., Meeting(185th :1983 :, Seattle, Wash.)
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