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" Integrated circuits : "
Pieter Stroeve, editor.
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BL
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| Record Number
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599232
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| Doc. No
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b428451
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| Title & Author
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Integrated circuits : : chemical and physical processing : developed from the winter symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society, University of California--Davis, March 26-27, 1984 /\ Pieter Stroeve, editor.
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| Publication Statement
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Washington, D.C. :: American Chemical Society,, 1985.
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| Series Statement
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ACS symposium series,; 290
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ix, 348 pages :: illustrations ;; 24 cm.
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| ISBN
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0841209405
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: 9780841209404
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| Bibliographies/Indexes
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Includes bibliographical references and indexes.
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| Contents
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Unit processes in the manufacture of integrated circuits / Pieter Stroeve -- Conservation laws for mass, momentum, and energy : application to semiconductor devices and technology / Bill Baerg -- Silicon oxidation : a process step for the manufacture of integrated circuits / Eugene A. Irene -- Convective diffusion in zone refining of low Prandtl number liquid metals and semiconductors / William N. Gill, Nicholas D. Kazarinoff, and John D. Verhoeven -- Research opportunities in resist technology / David S. Soong -- Physical and chemical modifications of photoresists / Peter C. Sukanek -- Effects of developer concentration on linewidth control in positive photoresists / Tom Batchelder -- The advantage of molecular-beam epitaxy for device applications / A.Y. Cho -- Chemical and physical processing of ion-implanted integrated circuits / Joseph C. Plunkett -- Plasma-assisted processing : the etching of polysilicon in a diatomic chlorine discharge / Herbert H. Sawin, Albert D. Richards, and Brian E. Thompson -- Applications of oxides and nitrides of germanium for semiconductor devices / O.J. Gregory and E.E. Crisman -- Vapor-phase epitaxy of Group III-V compound optoelectronic devices / G.H. Olsen -- Advanced device isolation for very large scale integration / H.B. Pogge -- Solid-liquid equilibrium in ternary Group III-V semiconductor materials / T.L. Aselage, K.M. Chang, and T.J. Anderson : preparation of device-quality strained-layer superlattices / R.M. Biefeld -- Wafer design and characterization for integrated-circuit processes / R. Schindler, D. Huber, and J. Reffle.
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| Subject
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Integrated circuits-- Very large scale integration-- Design and construction, Congresses.
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| LC Classification
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TK7874.I5462 1985
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| Added Entry
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Stroeve, Pieter,1945-
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| Added Entry
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American Chemical Society., Division of Industrial and Engineering Chemistry.
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American Chemical Society., Division of Industrial and Engineering Chemistry., Winter Symposium(1984 :, University of California, Davis)
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