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" Handbook of sputter deposition technology : "
edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera
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BL
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| Record Number
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601149
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| Doc. No
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b430368
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| Title & Author
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Handbook of sputter deposition technology : : fundamentals and applications for functional thin films, nano-materials and MEMS /\ edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera
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| Edition Statement
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2nd ed
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| Publication Statement
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Waltham, MA :: William Andrew,, 2012
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| Page. NO
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xii, 644 p. :: ill. ;; 24 cm
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| ISBN
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9781437734836
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: 1437734839
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| Bibliographies/Indexes
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Includes bibliographical references and index
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| Subject
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Cathode sputtering (Plating process), Handbooks, manuals, etc
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| Subject
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Thin films, Handbooks, manuals, etc
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| LC Classification
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TS695.W37 2012
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| Added Entry
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Wasa, Kiyotaka
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Kanno, Isaku
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Kotera, Hidetoshi
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