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" Ceramic thick films for MEMS and microdevices "


Document Type : BL
Record Number : 601158
Doc. No : b430377
Main Entry : Dorey, Robert
Title & Author : Ceramic thick films for MEMS and microdevices\ Robert Dorey
Publication Statement : Waltham, [MA] :: William Andrew,, c2012
Series Statement : Micro & nano technologies series
Page. NO : 1 online resource (1 v.) :: ill
ISBN : 9781437778175
: : 9781437778182
: : 1437778186
Bibliographies/Indexes : Includes bibliographical references and index
Subject : Microelectromechanical systems-- Design and construction
Subject : Nanoelectronics
Subject : Thick-film circuits-- Design and construction
Subject : Ceramic coating
LC Classification : ‭TK7875‬‭.D695 2012‬
Added Entry : Ohio Library and Information Network
Parallel Title : Ceramic thick films for microelectromechanical systems and microdevices
copyhttps://lib.clisel.com/site/catalogue/601158
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