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" Ion implantation technology-94 : "
editors, Salvatore Coffa ... [et al.].
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BL
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| Record Number
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606772
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| Doc. No
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dltt
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| Main Entry
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International Conference on Ion Implantation Technology(10th :1994 :, Catania, Italy)
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| Title & Author
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Ion implantation technology-94 : : proceedings of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13-17, 1994 /\ editors, Salvatore Coffa ... [et al.].
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| Publication Statement
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Amsterdam ;New York :: North-Holland,, 1995.
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| Page. NO
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xvii, 1012 p. :: ill. ;; 27 cm.
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| ISBN
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0444821945 (acid-free paper)
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| Notes
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"Part 1 (pp. 1-440) reprinted from: Nuclear instruments and methods in physics research, Section B: Beam interactions with materials and atoms, vol. B96, 1-2"--t.p. verso.
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| Bibliographies/Indexes
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Includes bibliographical references and index.
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| Subject
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Ion implantation-- Congresses.
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| Subject
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Semiconductor doping-- Congresses.
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| Added Entry
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Coffa, S.
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