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" Materials and processes for next generation lithography "


Document Type : BL
Record Number : 612219
Doc. No : dltt
Title & Author : Materials and processes for next generation lithography\ edited by Alex Robinson and Richard Lawson.
Publication Statement : Amsterdam, [Netherlands] ;Oxford, [England] ;Cambridge, Massachusetts :: Elsevier,, 2016.
Series Statement : Frontiers of Nanoscience ;; Volume 11
ISBN : 9780081003541
: : 9780081003589
Bibliographies/Indexes : Includes bibliographical references at the end of each chapters and index.
Subject : Lithography.
Added Entry : Robinson, Alex.
: Lawson, Richard.
Added Entry : ScienceDirect (Online service).
copyhttps://lib.clisel.com/site/catalogue/612219
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