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" Handbook of silicon based MEMS materials and technologies "


Document Type : BL
Record Number : 612806
Doc. No : dltt
Title & Author : Handbook of silicon based MEMS materials and technologies\ edited by Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos.
Edition Statement : Second edition.
Publication Statement : Amsterdam :: William Anderew is an imprint of Elsevier,, 2015.
Series Statement : Micro & nano technologies series
ISBN : 9780323299657
: : 0323299652
Bibliographies/Indexes : Includes bibliographical references and index.
Subject : Microelectromechanical systems.
Subject : Microelectromechanical systems-- Materials.
Subject : Silicon-- Electric properties.
Added Entry : Markku, Tilli.
Added Entry : ScienceDirect (Online service).
copyhttps://lib.clisel.com/site/catalogue/612806
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