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" Electrochemical micromachining for nanofabrication, MEMS and nanotechnology "
Bijoy Bhattacharyya, Production Engineering Department, Jadavpur University, Kolkata, India.
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BL
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612809
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dltt
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| Main Entry
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Bhattacharyya, Bijoy
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| Title & Author
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Electrochemical micromachining for nanofabrication, MEMS and nanotechnology\ Bijoy Bhattacharyya, Production Engineering Department, Jadavpur University, Kolkata, India.
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1 online resource :: illustrations
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| ISBN
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9780323352888
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9780323327374
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Includes bibliographical references and index.
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| Abstract
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This book describes electrochemical micromachining (EMM). It covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications; explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM; describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT). --
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Micromachining.
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Nanotechnology.
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Microelectromechanical systems.
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Books24x7, Inc.
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