|
" Etching of III-V semiconductors : "
P.H.L. Notten, J.E.A.M. van der Meerakker, J.J. Kelly.
| Document Type
|
:
|
BL
|
| Record Number
|
:
|
614090
|
| Doc. No
|
:
|
dltt
|
| Main Entry
|
:
|
Notten, P. H. L., (Peter H. L.)
|
| Title & Author
|
:
|
Etching of III-V semiconductors : : an electrochemical approach /\ P.H.L. Notten, J.E.A.M. van der Meerakker, J.J. Kelly.
|
| Publication Statement
|
:
|
Oxford, UK :: Elsevier Advanced Technology ;New York, NY, USA :: Distributed in the USA and Canada by Elsevier Science Pub. Co.,, c1991.
|
| Page. NO
|
:
|
xiv, 349 p. :: ill. ;; 25 cm.
|
| ISBN
|
:
|
0946395845
|
| Bibliographies/Indexes
|
:
|
Includes bibliographical references and indexes.
|
| Subject
|
:
|
Semiconductors-- Etching.
|
| Subject
|
:
|
Electrochemistry.
|
| Added Entry
|
:
|
Meerakker, J. E. A. M. van den, (Jan E. A. M.)
|
|
|
:
|
Kelly, J. J., (John J.)
|
| |