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" The Physics of Micro/Nano-Fabrication "
edited by Ivor Brodie, Julius J. Muray.
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BL
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621242
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dltt
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| Main Entry
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Brodie, Ivor.
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| Title & Author
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The Physics of Micro/Nano-Fabrication\ edited by Ivor Brodie, Julius J. Muray.
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| Publication Statement
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Boston, MA :: Springer US :: Imprint: Springer,, 1992.
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| Series Statement
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Microdevices, Physics and Fabrication Technologies
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| ISBN
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9781475767759
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: 9781441932211
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| Contents
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1. Preliminary Survey -- 2. Particle Beams: Sources, Optics, and Interactions -- 3. Plasmas: Physics and Chemistry -- 4. Layering Technologies -- 5. Pattern Generation -- 6. Microcharacterization -- 7. Limits to Nanofabrication -- Appendixes -- Author Index.
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| Abstract
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In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
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Physics.
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Crystallography.
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Computer engineering.
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Optical materials.
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Muray, Julius J.
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SpringerLink (Online service)
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