|
" Directed self-assembly of block copolymers for nano-manufacturing / "
edited by Roel Gronheid and Paul Nealey
| Document Type
|
:
|
BL
|
| Record Number
|
:
|
622067
|
| Doc. No
|
:
|
dltt
|
| Title & Author
|
:
|
Directed self-assembly of block copolymers for nano-manufacturing /\ edited by Roel Gronheid and Paul Nealey
|
| Series Statement
|
:
|
Woodhead Publishing series in electronic and optical materials ;; number 83
|
| Page. NO
|
:
|
xiv., 313 pages :: illustrations ;; 23 cm
|
| ISBN
|
:
|
9780081002506 (hbk.)
|
|
|
:
|
: 0081002505 (hbk.)
|
|
|
:
|
9780081002612 (PDF ebook)
|
| Bibliographies/Indexes
|
:
|
Includes bibliographical references and index
|
| Abstract
|
:
|
The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology
|
| Subject
|
:
|
Nanomanufacturing
|
| Subject
|
:
|
Block copolymers
|
| Subject
|
:
|
Self-assembly (Chemistry)
|
| Dewey Classification
|
:
|
620.5
|
| LC Classification
|
:
|
T174.7.D57 2015
|
|
|
:
|
T174.7.D57 2015
|
| Added Entry
|
:
|
Gronheid, Roel
|
|
|
:
|
Nealey, Paul
|
| |