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" Fabrication engineering at the micro and nanoscale / "


Document Type : BL
Record Number : 623775
Doc. No : dltt
Main Entry : Campbell, Stephen A.,1954-
Title & Author : Fabrication engineering at the micro and nanoscale /\ Stephen A. Campbell
Edition Statement : 3rd ed
Publication Statement : New York :: Oxford University Press,, 2008
Series Statement : Oxford series in electrical and computer engineering
Page. NO : xiv, 647 p. :: ill. ;; 24 cm
ISBN : 9780195320176 (pbk. : alk. paper)
: : 0195320174 (pbk. : alk. paper)
Notes : Rev. ed. of: The science and engineering of microelectronic fabrication. 2nd. ed
Bibliographies/Indexes : Includes bibliographical references and index
Subject : Semiconductors-- Design and construction
Dewey Classification : ‭621.3815/2‬
LC Classification : ‭TK7871.85‬‭.C25 2008‬
Added Entry : Campbell, Stephen A.,1954-
copyhttps://lib.clisel.com/site/catalogue/623775
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