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" Nanofabrication using focused ion and electron beams : "


Document Type : BL
Record Number : 624741
Doc. No : dltt
Title & Author : Nanofabrication using focused ion and electron beams : : principles and applications /\ edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell
Publication Statement : Oxford ;New York :: Oxford University Press,, 2012
Series Statement : Oxford series on nanomanufacturing
Page. NO : xvi, 813 p. :: ill. ;; 27 cm
ISBN : 9780199734214
: : 0199734216
Bibliographies/Indexes : Includes bibliographical references and index
Subject : Nanostructured materials
Subject : Nanotechnology
Subject : Electron beams-- Industrial applications
Subject : Ion bombardment-- Industrial applications
LC Classification : ‭TA418.9.N35‬‭N2525 2012‬
Added Entry : Utke, Ivo
: Moshkalev, Stanislav
: Russell, Phillip,1955-
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