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" Nano-and micro-electromechanical systems : "


Document Type : BL
Record Number : 638082
Doc. No : dltt
Main Entry : Lyshevski, Sergey Edward
Title & Author : Nano-and micro-electromechanical systems : : fundamentals of nano- and microengineering /\ Sergey Edward Lyshevski
Edition Statement : 2nd ed
Publication Statement : Boca Raton, Fla. :: CRC Press,, c2005
Series Statement : Nano- and microscience, engineering, technology, and medicine series
Page. NO : 722 p. :: ill. ;; 26 cm
ISBN : 0849328381 (alk. paper)
Bibliographies/Indexes : Includes bibliographical references and index
Subject : Microelectromechanical systems
Subject : Nanotechnology
Dewey Classification : ‭621.381‬
LC Classification : ‭TK7875‬‭.L96 2005‬
copyhttps://lib.clisel.com/site/catalogue/638082
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