Silicon wafer bonding technology :

" Silicon wafer bonding technology : "
edited by Subramanian S. Iyer and Andre J. Auberton-Hervé

Document Type	:	BL
Record Number	:	638243
Doc. No	:	dltt
Title & Author	:	Silicon wafer bonding technology : : for VLSI and MEMS applications /\ edited by Subramanian S. Iyer and Andre J. Auberton-Hervé
Publication Statement	:	London :: Institution of Electrical Engineers,, c2002
Series Statement	:	EMIS processing series ;
Page. NO	:	xxv, 149 p. :: ill. ;; 26 cm
ISBN	:	0852960395
Bibliographies/Indexes	:	Includes bibliographical references and index
Subject	:	Silicon-on-insulator technology
Subject	:	Integrated circuits-- Very large scale integration
Subject	:	Microelectromechanical systems
Dewey Classification	:	‭621.38152‬
Added Entry	:	Iyer, Subramanian S
	:	Auberton-Hervé, Andre J
Added Entry	:	Institution of Electrical Engineers
	:	INSPEC., EMIS Group

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