| Document Type
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BL
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| Record Number
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643990
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| Doc. No
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dltt
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| Main Entry
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Leach, R. K.
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| Title & Author
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Fundamental principles of engineering nanometrology /\ Richard Leach
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| Edition Statement
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Second edition
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Second edition
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Second edition
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Second edition
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| Series Statement
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Micro & nano technologies series
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| Page. NO
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1 online resource (384 pages).
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| ISBN
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1455777501 (electronic bk.)
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: 9781455777501 (electronic bk.)
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9781455777532
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| Notes
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Description based upon print version of record
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| Bibliographies/Indexes
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Includes bibliographical references and index
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| Abstract
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Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. This new edition of Fundamental Principles of Engineering Nanometrology provides a road map and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale, from the fundamentals of precision measurement, to different measurement and characterization techniques. This book is an essential guide for the emerging nanomanufacturing and nanofabrication sectors, where measurement and standardiza
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| Subject
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Metrology.
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| Subject
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Microtechnology.
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| Subject
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Nanotechnology.
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| Dewey Classification
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620.50287
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621.381
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| LC Classification
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T174.7.L43 2014eb
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