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" Materials science of thin films "
Milton Ohring
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BL
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| Record Number
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652173
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dltt
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| Main Entry
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Ohring, Milton,1936-
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| Title & Author
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Materials science of thin films : deposition and structure /\ Milton Ohring
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| Edition Statement
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2nd ed
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| Publication Statement
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San Diego, CA :: Academic Press,, c2002
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| Page. NO
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1 online resource (1 v.) :: ill
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| ISBN
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9780080491783
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: 0080491782
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9780125249751
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| Bibliographies/Indexes
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Includes bibliographical references and index
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| Contents
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A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chemical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterization of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films
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| Subject
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Thin films
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| LC Classification
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TA418.9.T45O47 2002
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| Added Entry
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Ohio Library and Information Network
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