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" A user's guide to ellipsometry / "
Harland G. Tompkins
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BL
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| Record Number
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653351
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dltt
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| Main Entry
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Tompkins, Harland G.
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| Title & Author
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A user's guide to ellipsometry /\ Harland G. Tompkins
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| Page. NO
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xv, 260 pages :: illustrations ;; 24 cm
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| ISBN
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0126939500
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| Notes
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Includes index
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| Bibliographies/Indexes
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Includes bibliographical references
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| Contents
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Ch. 1: Theoretical Aspects. Ch. 2: Instrumentation. Ch. 3: Using Optical Parameters to Determine Material Properties. Ch. 4: Determining Optical Parameters for Inaccessible Substrates and Unknown Films. Ch. 5: Extremely Thin Films. Ch. 6: The Special Case of Polysilicon. Ch. 7: The Effect of Roughness -- Case Studies. Case 1: Dissolution and Swelling of Thin Polymer Films. Case 2: Ion Beam Interaction with Silicon. Case 3: Dry Oxidation of Metals. Case 4: Optical Properties of Sputtered Chromium Suboxide Thin Films. Case 5: Ion-Assisted Film Growth of Zirconium Dioxide. Case 6: Electrochemical/Ellipsometric Studies of Oxides on Metals. Case 7: Amorphous Hydrogenated Carbon Films. Case 8: Fluoropolymer Films on Silicon from Reactive Ion Etching. Case 9: Various Films on InP. Case 10: Benzotriazole and Benzimidazole on Copper. Case 11: Gas Adsorption on Metal Surfaces. Case 12: Silicon-Germanium Thin Films. Case 13: Profiling of HgCdTe. Case 14: Oxides and Nitrides of Silicon -- Appendix A: Del/Psi Trajectory Calculations -- Appendix B: Effective Medium Considerations -- Appendix C: Literature Values of Optical Constants of Various Materials
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| Subject
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Ellipsometry.
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Ellipsometry, Case studies
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| Dewey Classification
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620.1/1295
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| LC Classification
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QC443.T65 1993
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