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" Handbook of cleaning for semiconductor manufacturing : "
Karen A. Reinhardt, Richard F. Reidy
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BL
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| Record Number
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657497
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dltt
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| Main Entry
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Reinhardt, Karen A
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| Title & Author
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Handbook of cleaning for semiconductor manufacturing : : fundamentals and applications /\ Karen A. Reinhardt, Richard F. Reidy
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| Publication Statement
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Salem, Mass. :Scrivener ;Hoboken, N.J. :: John Wiley & Sons, Inc.,, c2011
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| Page. NO
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xxii, 590 p. :: ill. ;; 26 cm
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| ISBN
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9780470625958
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: 0470625953
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: 9781118071748 (electronic bk.)
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: 1118071743 (electronic bk.)
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| Bibliographies/Indexes
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Includes bibliographical references and index
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| Contents
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Fundamentals. Surface and Colloidal Chemical Aspects of Wet Cleaning / Srini Raghavan, Manish Keswani, Nandini Venkataraman -- The Chemistry of Wet Cleaning / D Martin Knotter -- The Chemistry of Wet Etching / D Martin Knotter -- Surface Phenomena: Rinsing and Drying / Karen A Reinhardt, Richard F Reidy, John A Marsella -- Fundamental Design of Chemical Formulations / Robert J Rovito, Michael B Korzenski, Ping Jiang, Karen A Reinhardt -- Filtering, Recirculating, Reuse, and Recycling of Chemicals / Barry Gotlinsky, Kevin T Pate, Donald C Grant -- Applications. Cleaning Challenges of High-k/Metal Gate Structures / Muhammad M Hussain, Denis Shamiryan, Vasile Paraschiv, Kenichi Sano, Karen A Reinhardt -- High Dose Implant Stripping / Karen A Reinhardt, Michael B Korzenski -- Aluminum Interconnect Cleaning and Drying / David J Maloney -- Low-k/Cu Cleaning and Drying / Karen A Reinhardt, Richard F Reidy, Jerome Daviot -- Corrosion and Passivation of Copper / Darryl W Peters -- Germanium Surface Conditioning and Passivation / Sonja Sioncke, Yves J Chabal, Martin M Frank -- Wafer Reclaim / Michael B Korzenski, Ping Jiang -- Direct Wafer Bonding Surface Conditioning / Hubert Moriceau, Yannick C Le Tiec, Frank Fournel, Ludovic F L Ecarnot, Sebastien L E Kerdil̈s, Daniel Delprat, Christophe Maleville -- New Directions. Novel Analytical Methods for Cleaning Evaluation / Chris M Sparks, Alain C Diebold -- Stripping and Cleaning for Advanced Photolithography Applications / John A Marsella, Dana L Durham, Leslie D Molnar
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| Subject
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Semiconductors-- Surfaces-- Cleaning
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| LC Classification
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QC611.6.S9R456 2011
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| Added Entry
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Reidy, Richard F.,1960-
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