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" Micro- and nanopatterning polymers / "
Hiroshi Ito, editor ... [et al.]
Document Type
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BL
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Record Number
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660481
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Doc. No
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dltt
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Title & Author
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Micro- and nanopatterning polymers /\ Hiroshi Ito, editor ... [et al.]
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Publication Statement
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Washington, DC :: American Chemical Society ;[New York] :: Distributed by Oxford University Press,, c1998
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Series Statement
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ACS symposium series,
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Page. NO
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xii, 386 p. :: ill. ;; 24 cm
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ISBN
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0841235813
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Notes
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"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 214th ACS National Meeting, Las Vegas, Nevada, September 7-11, 1997."
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Bibliographies/Indexes
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Includes bibliographical references and indexes
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Subject
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Microelectronics-- Materials
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Subject
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Polymeric composites
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Subject
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Photoresists-- Materials
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Dewey Classification
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621.381
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LC Classification
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TK7871.15.P6M517 1998
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Added Entry
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Ito, Hiroshi
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Added Entry
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American Chemical Society., Division of Polymeric Materials: Science and Engineering
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American Chemical Society., Meeting(214th :1997 :, Las Vegas, Nev.)
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