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" Atomic layer deposition "
Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman.
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BL
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661316
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dltt
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| Main Entry
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Kääriäinen, Tommi.
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| Title & Author
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Atomic layer deposition : principles, characteristics, and nanotechnology applications /\ Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman.
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1 online resource.
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| ISBN
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9781118747407 (electronic bk.)
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: 1118747402 (electronic bk.)
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: 9781118747421 (electronic bk.)
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: 1118747429 (electronic bk.)
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9781118747384
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1118747380
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9781118747346
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1118747348
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9781118062777 (cloth : alk. paper)
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Includes bibliographical references and index.
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Chemical vapor deposition.
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Epitaxy.
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Microelectronics.
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Nanotechnology.
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| Dewey Classification
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620/.5
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Cameron, David,1949-
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Kääriäinen, Marja-Leena.
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Sherman, Arthur,1931-
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Ohio Library and Information Network.
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Wiley Online Library (Online service)
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