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" Measurement technology for micro-nanometer devices / "
Wendong Zhang, Xiujian Chou, Zongmin Ma, North University of China, Tielin Shi, Huazhong Univ. of Science and Technology, Haifei Bao, Jing Chen, Liguo Chen, Chenyang Xue, Dachao Li, Tianjin University
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BL
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| Record Number
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662084
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dltt
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| Main Entry
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Zhang, Wendong
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| Title & Author
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Measurement technology for micro-nanometer devices /\ Wendong Zhang, Xiujian Chou, Zongmin Ma, North University of China, Tielin Shi, Huazhong Univ. of Science and Technology, Haifei Bao, Jing Chen, Liguo Chen, Chenyang Xue, Dachao Li, Tianjin University
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1 online resource
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| ISBN
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9781118717998
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: 1118717996
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: 9781118717981
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: 1118717988
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: 9781118717974
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: 111871797X
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9781118717967
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1118717961
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| Bibliographies/Indexes
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Includes bibliographical references and index
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| Contents
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Geometry Measurements at the Micro/Nanoscale -- Dynamic Measurements at the Micro/Nanoscale -- Mechanical Characteristics Measurements -- SPM for MEMS/NEMS Measurements -- MEMS Online Measurements -- Typical Micro/Nanoscale Device Measurements
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Microtechnology-- Measurement.
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Nanotechnology-- Measurement.
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Microelectromechanical systems-- Testing.
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Physical measurements.
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| Dewey Classification
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681/.2
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| LC Classification
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TA418.9.N35
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| Added Entry
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Ohio Library and Information Network.
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