| Document Type
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BL
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| Record Number
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662600
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| Doc. No
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dltt
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| Title & Author
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Materials and failures in MEMS and NEMS /\ edited by Atul Tiwari and Baldev Raj
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| Series Statement
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Materials degradation and failures series
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| Page. NO
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1 online resource.
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| ISBN
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9781119083870 (pdf)
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: 1119083877 (pdf)
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: 9781119083863 (epub)
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: 1119083869 (epub)
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9781119083603 (cloth : alk. paper)
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: 9781119083887
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: 1119083885
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: 1119083605
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: 9781119083603
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| Bibliographies/Indexes
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Includes bibliographical references and index
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| Contents
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""Half Title page""; ""Title page""; ""Copyright page""; ""Preface""; ""Chapter 1: Carbon as a MEMS Material""; ""1.1 Introduction""; ""1.2 Structure and Properties of Glassy Carbon""; ""1.3 Fabrication of C-MEMS Structures""; ""1.4 Integration of C-MEMS Structures with Other Materials""; ""1.5 Conclusion""; ""References""; ""Chapter 2: Intelligent Model-Based Fault Diagnosis of MEMS""; ""2.1 Introduction""; ""2.2 Model-Based Fault Diagnosis""; ""2.3 Self-Tuning Estimation""; ""References""; ""Chapter 3: MEMS Heat Exchangers""; ""3.1 Introduction""
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""3.2 Fundamentals of Thermodynamics, Fluid Mechanics, and Heat Transfer""""3.3 MEMS Heat Sinks""; ""3.4 MEMS Heat Pipes""; ""3.5 Two-Fluid MEMS Heat Exchanger""; ""3.6 Need for Microscale Internal Flow Passages""; ""Nomenclature""; ""Greek Alphabets""; ""Subscripts""; ""References""; ""Chapter 4: Application of Porous Silicon in MEMS and Sensors Technology""; ""4.1 Introduction""; ""4.2 Porous Silicon in Biosensors""; ""4.3 Porous Silicon for Pressure Sensors""; ""4.4 Conclusion""; ""References""; ""Chapter 5: MEMS/NEMS Switches with Silicon to Silicon (Si-to-Si) Contact Interface""
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""5.1 Introduction""""5.2 Bi-Stable CMOS Front End Silicon Nanofin (SiNF) Switch for Non-volatile Memory Based On Van Der Waals Force""; ""5.3 Vertically Actuated U-Shape Nanowire NEMS Switch""; ""5.4 A Vacuum Encapsulated Si-to-Si MEMS Switch for Rugged Electronics""; ""5.5 Summary""; ""References""; ""Chapter 6: On the Design, Fabrication, and Characterization of cMUT Devices""; ""6.1 Introduction""; ""6.2 cMUT Design and Finite Element Modeling Simulation""; ""6.3 cMUT Fabrication and Characterization""; ""6.4 Summary and Conclusions""; ""Acknowledgments""; ""References""
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""Chapter 7: Inverse Problems in the MEMS/NEMS Applications""""7.1 Introduction""; ""7.2 Inverse Problems in the Micro/Nanomechanical Resonators""; ""7.3 Inverse Problems in the MEMS Stiction Test""; ""Acknowledgment""; ""References""; ""Chapter 8: Ohmic RF-MEMS Control""; ""8.1 Introduction""; ""8.2 Charge Drive Control (Resistive Damping)""; ""8.3 Hybrid Drive Control""; ""8.4 Control Under High-Pressure Gas Damping""; ""8.5 Comparison between Different Control Modes""; ""References""; ""Chapter 9: Dynamics of MEMS Devices""; ""9.1 Introduction""; ""9.2 Modeling and Simulation""
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""9.3 Fabrication Methods""""9.4 Characterization""; ""9.5 Device Failures""; ""Acknowledgments""; ""References""; ""Chapter 10: Buckling Behaviors and Interfacial Toughness of a Micron-Scale Composite Structure with a Metal Wire on a Flexible Substrate""; ""10.1 Introduction""; ""10.2 Buckling Behaviors of Constantan Wire under Electrical Loading""; ""10.3 Interfacial Toughness between Constantan Wire and Polymer Substrate""; ""10.4 Buckling Behaviors of Polymer Substrate Restricted by Constantan Wire""; ""10.5 Conclusions""; ""Acknowledgments""; ""References""
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| Subject
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Microelectromechanical systems-- Design and construction.
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| Subject
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Nanoelectromechanical systems-- Design and construction.
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| Dewey Classification
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621.381
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| LC Classification
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TK7875
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| Added Entry
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Tiwari, Atul
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Raj, Baldev,1947-2018
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| Added Entry
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Ohio Library and Information Network.
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