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" Smart sensors and MEMS "
edited by Sergey Y. Yurish and Maria Teresa S.R. Gomes.
Document Type
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BL
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Record Number
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663361
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Doc. No
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dltt
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Main Entry
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NATO Advanced Study Institute on Smart Sensors and MEMS(2003 :, Póvoa de Varzim, Portugal)
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Title & Author
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Smart sensors and MEMS : [proceedings of the NATO Advanced Study Institute on smart sensors and MEMS, Povoa de Varzim, Portugal, 8-19 September 2003] /\ edited by Sergey Y. Yurish and Maria Teresa S.R. Gomes.
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Publication Statement
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Dordrecht ;Boston :: Kluwer Academic,, c2004.
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Series Statement
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NATO science series. Series II, Mathematics, physics, and chemistry ;; v. 181
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Page. NO
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xv, 480 p. :: ill. ;; 24 cm.
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ISBN
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1402029276 (hd.bd.)
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: 9781402029271 (hd.bd.)
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: 1402029284
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: 9781402029288
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Bibliographies/Indexes
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Includes bibliographical references and index.
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Contents
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Smart sensors for electrical and non-electrical, physical and chemical variables: state-of-the-art / Sergey Y. Yurish -- Novel conversion methods for self-adaptive smart sensors / Sergey Y. Yurish and Nikolay V. Kirianaki -- Resonant piezoelectric devices as physical and biochemical sensors / Fabien Josse and Richard W. Cernosek -- Acoustic-wave piezoelectric and pyroelectric sensor based on PZT thick films / Vittorio Ferrari -- Wireless passive SAW identification marks and sensors / Elke Mackensen and Leonhard Reindl -- Precise vectorial magnetic sensors / Pavel Ripka -- Micro-hall magnetic sensors: physical, technologies and applications / Radivoje S. Popovic, Giovanni Boero, and Pierre-Andre Besse -- Modern silicon-based MEMS technology / Ulrich Mescheder -- Porous silicon: technology and applications for micromachining and MEMS / Ulrich Mescheder -- Thermal design of microelectronics system / Dmytro Fedasyuk and Volodymyr Makar -- Chemical and biological sensors based on microcantilevers / P.G. Datskos, N.V. Lavrik and M.J. Sepaniak -- Uncooled infrared MEMS detectors / P.G. Datskos and N.V. Lavrik -- Bulk acoustic wave sensors in chemical analysis / Maria Teresa S. R. Gomes -- Electronic biosensors based on biomaterial-nanoparticle hybrid systems / Eugenii Katz.
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Subject
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Microelectromechanical systems, Congresses.
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Subject
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Detectors-- Technological innovations, Congresses.
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Added Entry
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Yurish, Sergey Y.
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Gomes, Maria Teresa S. R.
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