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" Database needs for modeling and simulation of plasma processing "
Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
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BL
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| Record Number
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674810
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| Doc. No
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b503999
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| Title & Author
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Database needs for modeling and simulation of plasma processing\ Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
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| Publication Statement
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Washington, D.C. :: National Academy Press,, 1996.
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| Series Statement
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The compass series.
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| Page. NO
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64 p. ;; 28 cm.
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| ISBN
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0309055911
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| Bibliographies/Indexes
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Includes bibliographical references.
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| Subject
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Plasma engineering-- Computer simulation, Congresses.
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Plasma engineering-- Databases, Congresses.
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Semiconductors-- Design and construction, Congresses.
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| Added Entry
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ebrary, Inc.
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