|
" Handbook of semiconductor silicon technology "
edited by William C. O'Mara, Robert B. Herring, Lee P. Hunt.
| Document Type
|
:
|
BL
|
| Record Number
|
:
|
679693
|
| Doc. No
|
:
|
b501882
|
| Title & Author
|
:
|
Handbook of semiconductor silicon technology\ edited by William C. O'Mara, Robert B. Herring, Lee P. Hunt.
|
| Publication Statement
|
:
|
Park Ridge, N.J. :: Noyes Publications,, c1990.
|
| Series Statement
|
:
|
Materials science and process technology series.
|
| Page. NO
|
:
|
1 online resource (xx, 795 p.) :: ill.
|
| ISBN
|
:
|
0815512376
|
|
|
:
|
: 1591242940 (electronic bk.)
|
|
|
:
|
: 9780815512370
|
|
|
:
|
: 9781591242949 (electronic bk.)
|
| Bibliographies/Indexes
|
:
|
Includes bibliographical references and index.
|
| Abstract
|
:
|
This book is an up-to-date summary of the science, technology and manufacturing of semiconductor silicon materials.
|
| Subject
|
:
|
Semiconductors, Handbooks, manuals, etc.
|
| Subject
|
:
|
Silicon crystals, Handbooks, manuals, etc.
|
| Dewey Classification
|
:
|
621.3815/2
|
| LC Classification
|
:
|
TK7871.85.H334 1990eb
|
| Added Entry
|
:
|
Herring, Robert B.
|
|
|
:
|
Hunt, Lee P., (Lee Philip)
|
|
|
:
|
O'Mara, William C.
|
| Added Entry
|
:
|
Knovel (Firm)
|
| |