|
" EUV sources for lithography "
[edited by] Vivek Bakshi.
| Document Type
|
:
|
BL
|
| Record Number
|
:
|
679972
|
| Doc. No
|
:
|
b502161
|
| Title & Author
|
:
|
EUV sources for lithography\ [edited by] Vivek Bakshi.
|
| Publication Statement
|
:
|
Bellingham, Wash. :: SPIE Press,, c2006.
|
| Page. NO
|
:
|
1 online resource (xxxv, 1057 p.) :: ill.
|
| ISBN
|
:
|
0819458457
|
|
|
:
|
: 1615837167 (electronic bk.)
|
|
|
:
|
: 9780819458452
|
|
|
:
|
: 9781615837168 (electronic bk.)
|
| Bibliographies/Indexes
|
:
|
Includes bibliographical references and index.
|
| Abstract
|
:
|
This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPPs) and laser-produced plasmas (LPPs), to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation. Additional topics include EUV source metrology and components (collectors, electrodes), debris mitigation, and mechanisms of component erosion in EUV sources. The volume is intended to meet the needs of both practitioners of the technology and readers seeking an introduction to the subject.
|
| Subject
|
:
|
Extreme ultraviolet lithography.
|
| Subject
|
:
|
Lithography.
|
| Subject
|
:
|
Plasma (Ionized gases)
|
| Subject
|
:
|
Ultraviolet radiation-- Industrial applications.
|
| Dewey Classification
|
:
|
621.36/4
|
| LC Classification
|
:
|
QC459.E98 2006eb
|
| Added Entry
|
:
|
Bakshi, Vivek.
|
| Added Entry
|
:
|
Knovel (Firm)
|
| |