| Document Type
|
:
|
BL
|
| Record Number
|
:
|
694167
|
| Doc. No
|
:
|
b516356
|
| Main Entry
|
:
|
Campanella, Humberto
|
| Title & Author
|
:
|
Acoustic wave and electromechanical resonators : : concept to key applications /\ Humberto Campanella
|
| Publication Statement
|
:
|
Norwood, MA. :: Artech House,, c2010
|
| Page. NO
|
:
|
xv, 345 p. :: ill. ;; 26 cm
|
| ISBN
|
:
|
1607839776
|
|
|
:
|
: 9781607839774
|
| Bibliographies/Indexes
|
:
|
Includes bibliographical references and index
|
| Contents
|
:
|
1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies
|
| Subject
|
:
|
Acoustic surface wave devices
|
| Subject
|
:
|
Electric resonators
|
| Dewey Classification
|
:
|
621.381
|
| Parallel Title
|
:
|
Acoustic wave & electromechanical resonators
|