| Document Type
|
:
|
BL
|
| Record Number
|
:
|
717199
|
| Doc. No
|
:
|
b536884
|
| Main Entry
|
:
|
by Donald M. Mattox.
|
| Title & Author
|
:
|
Handbook of physical vapor deposition (PVD) processing : : film formation, adhesion, surface preparation and contamination control\ by Donald M. Mattox.
|
| Publication Statement
|
:
|
Westwood, N.J.: Noyes Publications, ©1998.
|
| Page. NO
|
:
|
(xxvii, 945 pages) : illustrations
|
| ISBN
|
:
|
0815517610
|
|
|
:
|
: 9780815517610
|
| Contents
|
:
|
Preface"; "Contributors"; "Table of Contents"; "1 INTRODUCTION"; "2 SILICIDES AND CONTACTS FOR ULSI"; "3 ALUMINUM BASED MULTILEVEL METALLIZATIONS IN VLSI/ULSICs"; "4 INORGANIC DIELECTRICS"; "5 ORGANIC DIELECTRICS IN MULTILEVEL METALLIZATION OF INTEGRATED CIRCUITS"; "6 PLANARIZATION TECHNIQUES"; "7 LITHOGRAPHY AND ETCH ISSUES FOR A MULTILEVEL METALLIZATION SYSTEM"; "8 ELECTRO- AND STRESS MIGRATION IN MLM INTERCONNECT STRUCTURES"; "9 MULTILEVEL METALLIZATION TEST VEHICLE"; "10 MANUFACTURING AND ANALYTIC METHODS" "11 characterization techniques for vlsi multilevel metallization""12 electronic packaging and its influences on integrated circuit design and processing"; "13 future interconnect systems"; "index"
|
| Abstract
|
:
|
Covers various aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. This book also covers substrate characterization, adhesion, cleaning and processing.
|
| Subject
|
:
|
Physical vapor deposition -- Handbooks, manuals, etc.
|
| Subject
|
:
|
Physical vapor deposition.
|
| Subject
|
:
|
TECHNOLOGY ENGINEERING -- Technical Manufacturing Industries Trades.
|
| Added Entry
|
:
|
D M Mattox
|