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" An Introduction to Surface-Micromachining "
by Robert W. Johnstone, M. Parameswaran.
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BL
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| Record Number
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734302
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b554133
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| Main Entry
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by Robert W. Johnstone, M. Parameswaran.
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| Title & Author
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An Introduction to Surface-Micromachining\ by Robert W. Johnstone, M. Parameswaran.
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| Publication Statement
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Boston, MA: Springer US, 2004
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| Page. NO
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(xiii, 189 pages)
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| ISBN
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1402080212
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: 9781402080210
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| Contents
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1. Introduction --;1.1 Why miniaturize? --;1.2 Why surface-micromachining? --;1.3 History --;References --;I Fabrication --;2. Microfabrication Processes --;3. Micromachining Technologies --;II Design --;4. Microscale Physics --;5. Mechanics --;6. Design Rules --;7. Non-Ideal Processes --;8. Design Techniques --;III Devices --;9. Electrical Components --;10. Mechanical Components --;11. Electrostatic Actuators --;12. Electro-Thermal-Compliant Actuators --;13. Raised Structures --;IV Processes --;14. PolyMUMPsTM Process --;15. SUMMiTTM Process --;16. MUSiC® Process.
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| Abstract
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Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components.
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| Subject
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Computer engineering.
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Engineering.
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Mechanical engineering.
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| LC Classification
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TJ1191.5B976 2004
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| Added Entry
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M Parameswaran
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Robert W Johnstone
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