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" CVD of compound semiconductors : "


Document Type : BL
Record Number : 743584
Doc. No : b563532
Main Entry : Anthony C. Jones, Paul O'Brien.
Title & Author : CVD of compound semiconductors : : precursor synthesis, development and applications\ Anthony C. Jones, Paul O'Brien.
Publication Statement : Weinheim, Germany ; Cambridge : VCH, 2010
Series Statement : Economies of Asia, 10
Page. NO : (xiv, 338 Seiten) : Illustrationen.
ISBN : 3527292942
: : 3527614621
: : 352761463X
: : 9783527292943
: : 9783527614622
: : 9783527614639
Notes : Text on lining papers. - Includes bibliographical references (pages 313-314) and index. - Print version record.
Contents : Basic Electronics Introduction to Vapor-Phase Epitaxy MOCVD ALE CBE Precursor Chemistry General Classes Synthesis/Purification Effects of Trace Impurities on Layer Properties Deposition of III-V Semiconductors MOCVD ALE CBE Deposition of II-VI Semiconductors MOCVD ALE Future Prospects
Subject : Chemical vapor deposition.
Subject : Compound semiconductors -- Design and construction.
LC Classification : ‭TK7871.99.C65‬‭A584 2010‬
Added Entry : Anthony C Jones
: Paul O'Brien
copyhttps://lib.clisel.com/site/catalogue/743584
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