|
" Multilayer Integrated Film Bulk Acoustic Resonators "
by Yafei Zhang, Da Chen.
| Document Type
|
:
|
BL
|
| Record Number
|
:
|
747561
|
| Doc. No
|
:
|
b567512
|
| Main Entry
|
:
|
by Yafei Zhang, Da Chen.
|
| Title & Author
|
:
|
Multilayer Integrated Film Bulk Acoustic Resonators\ by Yafei Zhang, Da Chen.
|
| Publication Statement
|
:
|
Berlin, Heidelberg : Springer Berlin Heidelberg, 2013
|
| ISBN
|
:
|
1283631555
|
|
|
:
|
: 3642317758
|
|
|
:
|
: 3642317766
|
|
|
:
|
: 7313087365
|
|
|
:
|
: 9781283631556
|
|
|
:
|
: 9783642317750
|
|
|
:
|
: 9783642317767
|
|
|
:
|
: 9787313087362
|
| Contents
|
:
|
Introduction.- Propagation of Acoustic Wave in Crystals.- The Theory of FBAR.- The Sputtering Deposition and Etching of AlN Film.- The Membrane Structured FBAR.- Solidly Mounted Acoustic Resonator.- The Application of FBAR in RF Filters.- The FBAR Excited by Lateral Filed.- High Sensitive Sensors Based on FBAR.
|
| Subject
|
:
|
Engineering.
|
| Subject
|
:
|
Surfaces (Physics)
|
| |