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" Ultra-Fast Silicon Bipolar Technology "
edited by Ludwig Treitinger, Mitiko Miura-Mattausch.
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BL
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| Record Number
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753312
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b573273
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| Main Entry
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edited by Ludwig Treitinger, Mitiko Miura-Mattausch.
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| Title & Author
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Ultra-Fast Silicon Bipolar Technology\ edited by Ludwig Treitinger, Mitiko Miura-Mattausch.
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| Publication Statement
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Berlin, Heidelberg : Springer Berlin Heidelberg, 1988
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| Series Statement
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Springer series in electronics and photonics, 27.
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| Page. NO
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(ix, 167 pages 125 illustrations)
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| ISBN
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3540506381
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: 3642743609
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: 9783540506386
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: 9783642743603
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| Contents
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History, Present Trends, and Scaling of Silicon Bipolar Technology --; Self-Aligning Technology for Sub-100nm Deep Base Junction Transistors --; Vertical Scaling Considerations for Polysilicon-Emitter Bipolar Transistors --; Trench Isolation Schemes for Bipolar Devices: Benefits and Limiting Aspects --; A Salicide Base Contact Technology (SCOT) for Use in High Speed Bipolar VLSI --; Advanced Self-Alignment Technologies and Resulting Structures of High-Speed Bipolar Transistors --; Trends in Heterojunction Silicon Bipolar Transistors --; Molecular Beam Epitaxy of Silicon-Based Bipolar Structures --; Subject Index.
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| Abstract
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This book presents an overview of important current and (near) future developments of high-performance bipolar devices and the corresponding technologies. It is written by foremost experts who are themselves engaged in the developments within the leading companies, thus giving the most up-to-date results. The reviews presented here show clearly that there remains a large potential for further progress in this field. This progress is characterized by the demands for higher speed and lower power consumption for single-chip systems. It is also apparent that a large part of this potential can be realized by rather unsophisticated techniques and configurations well suited to uncomplicated transfer to fabrication. The book is written in a style that should be understandable not only to experts but also to newcomers to the bipolar field.
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| Subject
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Electronics.
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Optical materials.
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Surfaces (Physics)
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| LC Classification
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TK7871.96.B55E358 1988
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| Added Entry
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Ludwig Treitinger
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Mitiko Miura-Mattausch
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