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" Secondary Ion Mass Spectrometry SIMS IV : "
Vitalii I Goldanskii
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BL
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754314
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b574276
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Vitalii I Goldanskii
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Secondary Ion Mass Spectrometry SIMS IV : : Proceedings of the Fourth International Conference, Osaka, Japan, November 13-19, 1983.\ Vitalii I Goldanskii
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Berlin/Heidelberg : Springer Berlin Heidelberg, 1984
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(517 pages)
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| ISBN
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3642822568
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: 9783642822568
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| Contents
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I Fundamentals.- Fundamentals of Sputtering..- Sputtered Atom Yields and Ionization Probabilities of Binary Alloys Under O2+ Bombardment..- Sputtering and Secondary Ion Yields of Ti-Al Alloys Subjected to Oxygen Ion Bombardment..- Outermost Surface Composition of Au-Cu Alloys Under Ion Bombardment of Different Current Densities of Ar+ Ions..- Secondary Dimer Ion Emission Probability in Sputtering Cu-Ni Alloy.- Empirical Formula for Sputtering Yield and Z2 Dependence of Its Q Values.- Molecular Dynamics Computer Simulation Investigation of Target Damage Created by Ion Bombardment..- Simulation of Ion Sputtering Process on the Binary Alloy.- Secondary Ion Emission from Si Subjected to Oxygen Ion Bombardment.- Surface Structure of Oxidized Metals Bombarded by Incident Ions.- The Effect of Energetic Electrons on the Secondary Ion Emission.- Influence of Alkali Metals on the Negative Secondary Ion Emission from Silicon..- Secondary Ion Emission Peculiarities at Metal Interfaces.- Intensities and Energy Spectra of Secondary Ions Sputtered from Fe-Al Alloys by Ar+ Ion Bombardment in Ultrahigh Vacuum.- CF3+: An Alternative Primary Beam Source for the Sensitive Detection of Electropositive Elements in SIMS..- Hydrogen Ion Bombardment in Secondary Ion Mass Spectrometry.- Electron Tunneling and the Emission of Secondary Ions from Silicon Surfaces.- Detection of Sputtered Neutrals by Multiphoton Resonance Ionization.- The Energy Dependence of the Ionisation Coefficient in SIMS.- Accurate Measurement of Energy Distribution Curves of Secondary Ions by UHV-IMMA..- Energy Distribution of Positive Secondary Ions from Pure Elements and Amorphous Alloys..- Energy Distribution of Secondary Ions Emitted from Silicate Minerals.- A Retarding-Accelerating Energy Analyser for SIMS..- II Quantification.- Current Status of Sputtered Ion Emission Models..- LTE Quantification of SIMS of Ni-Cr Alloy.- Simplified IMISR Method with Computer Data Acquisition..- Relative Sensitivity Factor of Compound Semiconductor by SIMS.- Quantitative Ion Probe Analysis of Oxidized Surface Using N2+ Primary Ion..- Oxygen Effect on Secondary Ion Yield in Oxygen-Doped Silicon.- The Role of Standards in Secondary Ion Mass Spectrometry.- SIMS Quantitative Analysis of Impurities in GaAs Using Multi-Element-Doped GaAs..- SIMS Quantitative Analysis of Gallium in Silicon by Using Ion-Implanted Samples for Standards..- III Instrumentation.- Ion Gun Systems for Submicron SIMS..- Submicron Ion Probes..- Optimization of High Brightness Cs Ion Source and Ion Optics for UHV-IMMA..- A New Type Surface Ionization Source with an Additional Mode of Electrohydrodynamic Ionization for SIMS..- A Study of Argon Ion Gun in SIMS..- Liquid Metal Ion Sources for Scanning SIMS.- SIMS with Very High Spatial Resolution Using Liquid Metal Ion Sources.- Development of High Performance Ion Microanalyzer..- MIQ-156 MARK II A Highly Advanced and Versatile Quadrupole SIMS Instrument, with Dual Primary Ion Source.- Development of Shielded Ion Microprobe Analyser for Irradiated Fast Reactor Fuel and Material Examination..- Parameters Influencing Ion Intensities for Quadrupole SIMS Instruments.- Isotopic Measurements at High Mass Resolution by Electrostatic Peak Switching..- Laser Microprobe Mass Spectrometry..- Metastable Molecular Ion Emission from Semiconductor Surfaces Under N2 Laser Irradiation..- Laser-Induced Sputtering from CdS and GaAs..- SIMS at Higher Energies..- The Radiocarbon Measurement with the Tandem Accelerator at Nagoya University..- Image Processing SIMS..- Evaluation of Metal Interaction by Color Display SIMS Technique.- A Comparison of Camera-Based and Quantized Detectors for Image Processing on an Ion Microscope..- Automation of an Ion Microprobe Mass Analyzer.- IV Combined and Static SIMS.- Ultra-High Vacuum SIMS: A Pilgrim's Journey Through History.- Single Crystal Surface Structure Studies with Static SIMS.- Ion Dose Effect in Thin Film Formation on Nb(100).- A Low-Energy SIMS Investigation on Thermal Diffusion on Vapor-Deposited Nickel on Copper Substrate.- SIMS Combined with Other Methods of Surface Analysis..- Combined SIMS and Electron Spectroscopy Investigation of the Chemical State of Some Ion-Implanted Transition Metals and Steels.- SIMS-Auger Analysis of Organic Films on Gallium Arsenide.- SIMS and AES Studies of Ni-Zn Alloys..- The Application of SIMS and other Surface Techniques to the Study of Antimony-Doped Tin oxide Surfaces..- Silver Catalyst for Partial oxidation of Methanol. Reaction Path and Catalyst Poisoning by Iron.
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A Combined SIMS, TDMS, AES, XPS and ISS Study..- Behavior of Inorganic Materials on Catalysts Used for Coal Liquefaction.- Quantitative Investigation of As Segregation at the SiO2/Si Interface by SIMS and RBS..- Low Energy Oxygen Ion Implantation and Ion-Bombardment Induced oxidation of Silicon, Studied by SIMS, AES and XPS.- The Effects of Ion Beam Sputtering on the Chemical State of Metal oxide Surfaces..- Combined Spectrometer with the Techniques of SIMS, ISS, AES and XPS.- V Application to Semiconductor and Depth Profiling.- The Use of SIMS for Semiconductor Processing Technology: The Influence of Oxygen at Depth Profiling..- Photon Radiation Annealing of Ion-Implanted Silicon.- Quantification of Silicon Wafer Cleaning Using Secondary Ion Mass Spectroscopy..- SIMS Study of Surface Contamination Due to Ion Implantation.- Quantitative Analysis of Amorphous Silicon Nitride Using SIMS.- The Contribution of SIMS to the Characterization of III-V Compounds.- Effects of Donor Impurities on the Redistribution of Mn Acceptors in In1?XGaXAs..- Residual Donor Impurities in Undoped LEC SI-GaAs Crystals.- Quantitative Depth Profile Analysis by Secondary Neutral Mass Spectrometry (SNMS)..- Practical Limitations in Depth Profiling of Low Energy Implants into Amorphised and Crystalline Silicon..- Depth Profiling of Dopant Distribution in Small Area Transistors.- Comparison of Oxygen and Indium Primary Ion Beams for SIMS-Depth Profiling..- Application of Computer-Controlled SIMS to Depth Profiling of Impurities Implanted in Silicon with High Dose of B+ or BF2+ Ions.- Improvements in the Routine Depth Profiling of Doping Elements.- Aspects of SIMS Evaluation of Tracer Diffusion and Its Isotope Effect..- High-Performance Depth Profiling with a Quadrupole-Based SIMS Instrument..- Depth Profiling of Evaporated Se-Te Films with SIMS..- Depth Profiling of Heat-Treated Mo Films on SiO2/Si Substrates.- SIMS Depth Profiling of Shallow As Implants in Si and SiO2.- Depth Profiling by SIMS to Minimize Charging Effects.- Quantitative Depth Profiling of B and P in Borophosphosilicate Glass.- Investigation of Gas Phase Ions with a Quadrupole SIMS Instrument.- VI Organic SIMS.- Organic Secondary Ion Mass Spectrometry..- Characteristics of Molecular Secondary Ion Mass Spectrometry.- Mechanisms of Organic Molecule Ejection in SIMS and FABMS Experiments.- Comparison of the Laser Mass Spectra and SIMS Spectra of Amino Acids.- Laser Desorption Mass Spectrometry of Complex Biomolecules at High Laser Power Density..- Organic SIMS Studies with a Hollow Anode Ion Source..- An Apparatus for Studying Liquid Matrix Assisted Organic Secondary Ion Processes..- Comparison of Three Source Geometries for Cs+ Liquid SIMS.- Study of Metastable Ions from Molecular Species Produced by Molecular Secondary Ion Mass Spectrometry..- Monte Carlo Simulation of an Ion Sputtering Process of Polymer Materials..- Depth Profiling of Polymer Blends and Optical Fiber with the Aid of SIMS..- Application of SIMS Technique to Organic Polymers..- Analysis of Molecular Species of Organic Compounds Dispersed in Polymer Layer Using LDMS and SIMS..- Cesium Ion Liquid Matrix Secondary Ion Mass Spectrometry and Its Impact on the Characterization of Free Labile Biological Substances.- A New Time-of-Flight Instrument for SIMS and Its Application to Organic Compounds..- Analysis of CsI and Peptide Mixture by Molecular SIMS..- Sequencing of Peptides by SIMS from the C or N Terminus.- Secondary Ion Mass Spectra of Triterpenoidal Oligoglycoside.- Structural Characterization of Naturally Occurring Oligosaccharides by Matrix-Assisted Molecular Secondary Ion Mass Spectrometry.- Characteristics of Peptide Fragmentation Patterns in Molecular Secondary Ion (SI) Mass Spectra.- VII Application.- Metallic and Inorganic Materials.- Detection of Hydrogen in Steel Using SIMS.- Surface Analysis Applied to Cold Rolled Steel Sheets..- Effects of Atmosphere Upon SIMS Analysis of Oxygen Isotopes in Oxides and Accurate Determination of Tracer Diffusivity of Oxygen.- Tracer Diffusion Coefficient of Oxide Ions in LaFeO3 by SIMS Measurement..- A Study by Low Energy SIMS of Chromium Behavior in an Oxide Film of Low-Chromium Steel..- FAB-SIMS Study for Analysis of Insulators.- Geology.- Geological Applications of SIMS..- Mineral/Groundmass Partitioning for Chrome Spinel in Boninite.- Quantitative SIMS Analysis of Metastable Plagioclase in Boggild Intergrowth..- SIMS Study on Ion Impact Desorption of Water from Silica Gel.- Molecular Ion Suppression in the Secondary Ion Mass Spectra of Minerals..- Self-Diffusion of Silicon and Oxygen in Silicate Melts: An Experimental Study..- Quantitative Analysis of Metallic Ions Associated with Fluid Inclusion.- SIMS Measurement of Magnesium Isotopic Ratios in Primitive Meteorites.- Biology.- Sensitivity and Quantitation of SIMS as Applied to Biomineralizations.- SIMS in Biology and Medicine..- Cell Cultures: An Alternative in Biological Ion Microscopy.- Secondary Ion Emission Microanalysis Applied to the Uranium Detection in Aquatic Organisms..- Tissue Microlocalization of Isotopes by Ion Microscopy and by Microautoradiography..- An Empirical Approach to Quantitative Analysis of Biological Samples by Secondary Ion Mass Spectrometry (SIMS).- Index of Contributors.
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Fritz Peter Schäfer
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Robert Gomer
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Vitalii I Goldanskii
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