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" Emerging Technologies for In Situ Processing "
edited by Daniel J. Ehrlich, Van Tran Nguyen.
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BL
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| Record Number
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772648
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b592642
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| Main Entry
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edited by Daniel J. Ehrlich, Van Tran Nguyen.
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| Title & Author
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Emerging Technologies for In Situ Processing\ edited by Daniel J. Ehrlich, Van Tran Nguyen.
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| Publication Statement
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Dordrecht : Springer Netherlands, 1988
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| Series Statement
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NATO ASI series., Series E,, Applied sciences ;, 139.
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| Page. NO
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(304 pages)
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| ISBN
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9400914091
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: 9401071306
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: 9789400914094
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: 9789401071307
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| Contents
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1. In-Situ Processing Combining MBE, Lithography and Ion-Implantation --; 2. Motivations and Early Demonstrations for In-Situ Processings For III-V Semiconductor Devices --; 3. Laser Etching and Microelectronic Applications --; 4. Laser-Induced Chemical Processing of Materials --; 5. High Technology Manufacturing: Critical Issues for the Future --; 6. Ultra High Vacuum Processing: MBE --; 7. Epitaxial Growth of III-V Materials on Implanted III-V Substrates --; 8. Mechanisms of Laser-Induced Deposition from the Gas Phase --; 9. Time Resolved Measurements in the Thermally Assisted Photolytic Laser Chemical Vapor Deposition of Platinum --; 10. Excimer Laser Projection Patterning --; 11. Excimer Laser Patterning and Etching of Metals --; 12. Ion Projection Lithography --; 13. UV Light-Assisted Deposition of A1 on Si from TMA --; 14. E-Beam Induced Decomposition of Inorganic Solids --; 15. Electronic Connection Through Silicon Wafers --; 16. The Development and Use of Novel Precursors for Photolytic Deposition of Dielectric Films --; 17. Focused Ion Beam Induced Deposition --; 18. Laser-Induced Metal Deposition for Clear Defect Repair Work on X-Ray Masks --; 19. Confirmation of the Wavelength Dependence of Silicon Oxidation Induced By Visible Radiation --; 20. Focused Ion Beam Technology and Applications --; 21. Laser Direct Writing for Device Applications --; 22. Laser-Induced Photoetching of Semiconductors with Chlorine --; 23. Recent Advances in Photo-Epitaxy for Infrared Detector Fabrication --; 24. Synthesis and Characterization of Laser Driven Powders --; 25. Physical Properties of Laser Written Chromium Oxide Thin Films --; 26. UV Laser Induced Oxidation of Silicon in Solid and Liquid Phase Regime --; 27. Laser Assisted Plasma Etching of Silicon Dioxide --; 28. Nd: Yag Laser Processing for Circuit modification and Direct Writing of Silicon Conductors --; 29. Study of Excimer laser Enhanced Etching of Copper and Silicon With (SUB) Monolayer Coverages of Chlorine --; 30. Surface Chemical Probes and Their Application to the Study of In Situ Semicmductor Processing.
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| Subject
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Computer engineering.
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Surfaces (Physics)
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| LC Classification
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TK7874.E358 1988
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| Added Entry
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Daniel J Ehrlich
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Van Tran Nguyen
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| Parallel Title
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Proceedings of the NATO Advanced Research Workshop, Cargèse, France, May 4-8, 1987
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