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BL
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| Record Number
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775227
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b595222
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| Main Entry
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edited by R.A. Levy.
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| Title & Author
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Novel Silicon Based Technologies\ edited by R.A. Levy.
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| Publication Statement
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Dordrecht : Springer Netherlands : Imprint : Springer, 1991
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| Series Statement
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NATO ASI series., Series E,, Applied sciences ;, 193.
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| Page. NO
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(292 pages)
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| ISBN
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9401055173
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: 9401134308
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: 9789401055178
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: 9789401134309
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| Contents
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GaAs on Si: Device Applications.- Substrate Considerations.- Majority-Carrier Devices.- Minority-Carrier Devices.- Conclusions.- Ion Beam Synthesis in Silicon.- The Ion Implantation Process.- Buried SiO2 Layers in Si.- Buried Monocrystalline CoSi2 Layers in Si.- Conclusions.- Ion Beam Processing of Chemical Vapor Deposited Silicon Layers.- Ion Beam Effects.- Epitaxy of Deposited Layers.- Polycrystal Formation.- Technology and Devices for Silicon Based Three-Dimensional Circuits.- 3D-Technology.- Device Characteristics.- Features of 3D-Circuits.- Demonstrators.- Conclusions.- Integrated Fabrication of Micromechanical Structures on Silicon.- Mechanical Properties of Silicon.- Thermal Properties.- Fabrication Techniques.- Etching.- Anisotropic Etching.- Boron Doped Etch Stop.- Electrochemical Etch Stop.- Embedded Layers.- Surface Microstructures.- Bonding of Layers.- Electrostatic Bonding.- Oxide Bonding.- Bonding to Metals.- Conclusion.- Micromachining of Silicon for Sensors.- Physical Properties of Silicon.- Transduction Techniques.- Fabrication Techniques.- Pressure Sensors.- Accelerometers.- Microresonator Sensors.- Optical Microresonator Sensors.- Conclusions.- Micromachining of Silicon for Sensors.- Hybrid or Monolithic Approach for optoelectronics: That is the question.- About the Hybrid Approach Material Competitors.- Silicon Based Technologies developed at LETI.- Planar and Channel waveguide Properties of IOS Technologies.- Field of Activities.- Integrated Optical Spectrum Analyser (IOSA).- Integrated Optical Sensors.- Optical Communication Applications.- Optical Memories.- Conclusion.- Principles and Implementation of Artificial Neural Networks.- Binary Networks.- Analog Networks.- Miscellaneous Networks.- Future VLSI Networks.- Conclusions.- List of Participants.
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| Subject
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Integrated circuits -- Materials -- Congresses.
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Silicon crystals -- Congresses.
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Silicon-on-insulator technology -- Congresses.
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| Added Entry
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R A Levy
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| Parallel Title
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Proceedings of the NATO Advanced Study Institute, Boca Raton, Florida, U.S.A., July 17-28, 1989
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